A Multi-mode Non-linear Acoustic Piezoelectric MEMS Energy Harvester

Piezoelectric MEMS energy harvesters have been proven to be a potential power source in a wide range of applications. In this work, a new architecture for acoustic piezoelectric MEMS energy harvesters is proposed. The proposed MEMS harvester is intended to be used as a replacement for the membranes utilized in acoustic energy harvesters (AEH). The prototyped harvester with an area of 1700 μm by 1700 μm has an operating frequency between 7 and 21 kHz, while the maximum of harvested power with the generated acoustic waves by the piezo speaker is 16 nW. Finally, the advantages of using an acoustic cavity with the proposed AEH in terms of output power and its possibility as a displacement sensor is demonstrated.