Picosecond Laser Structuring Technology for LTCC - the Improvement of Fine Line Structuring

The paper presents actual results and applications of the developed picosecond laser structuring technology for low temperature cofired ceramics (LTCC). Standard screen-printed thick films on LTCC are ablated in the green and fired state for buried structures and structures at the top layer using a pulsed picosecond UV laser. Resolutions of <; 20 μm lines and spaces with an accuracy and a reproducibility of below 1 μm are demonstrated Micro vias with diameters down to 30 μm are presented Furthermore laser drilling of micro nozzles in sintered LTCC membranes are shown. Related to high resolutions for buried structures a process for the minimized positional tolerance of structures in different layers is described.