AMHS Vehicle Management Policies in Semiconductor Manufacturing: A Short Review

This paper studies vehicle management in unified Automated Material Handling Systems (AMHS) of semiconductor manufacturing facilities. The main characteristics of an AMHS are first discussed. Then, the literature on vehicle management policies, decomposed into vehicle dispatching policies and vehicle routing policies, is surveyed. Vehicle dispatching policies are decomposed into vehicle initiated policies, lot initiated policies and empty vehicle policies. Some challenging research perspectives are also highlighted.