Outstanding Optical and Electrical Hydrogen Gas Sensing Performance of WO3 Nano-Walls

WO
₃
is known as one of the most important and promising gas sensing materials among the other metal oxides due to their superior sensing performance, low cost, easy to produce and compatibility with modern electronic devices. As the properties of gas sensors are considered, challenging issues such as high sensitivity, good selectivity, fast response and recovery can be achieved by increasing the surface area which requires nano surface morphologies. In this study, we present nano-wall WO
₃
structures grown by RF sputtering for the hydrogen gas sensing performances. Nano-wall structures (NWSs) have been grown in three different thicknesses (300 nm, 600 nm, 1200nm) on glass substrates and different growth temperatures on fused silica substrate (500-800 °C). On the other hand, these NWSs were grown on the interdigitate contacts for electrical gas sensor measurements.