Design and characterization of waveguide-coupled cylindrical microring resonators in Si/sub 3/N/sub 4/

Cylindrical micro-resonators have been proposed as all-optical switch, micro-laser, add-drop filters and they open the route to large area reduction complex integrated optics devices. They have been studied in literature both theoretically and experimentally. In this paper we present preliminary results of microring resonators in Si/sub 3/N/sub 4/ technology. The experimental free spectral ranges and finesses of the ring modes are compared with detailed simulations.