XRD and Raman spectroscopy study on the effects of post-annealing temperature of TiO2 thin films

A blend of anatase-rutile phase of titanium dioxide could be a new finding for many applications. The hurdle lies on the transformation temperature. Understanding the mechanism of the phase transformation is merely important. In this work, a set of Titanium dioxide deposited on glass by RF magnetron sputtering deposition system has been prepared, subsequently it was annealed at different temperatures ranging from 300-700°C for the duration of 1h. The influence of the post-annealing on the structural and bonding behavior for phase transformation have been investigated by X-ray Diffraction (XRD, expert powder), and Raman spectroscopy (Raman, Horiba). The phase transformation from anatase to rutile occurs at temperature 500°C to 700°C. The crystal plane of anatase phase shows dominant at (200) and (204) for 700°C, while (101) and (111) for 500°C post-annealing temperature. The Raman spectroscopy exhibits the correlation behavior with XRD for intensity peak broadening and shifting of Raman shift with increasing temperature.