Multiple-sensor micro-system for pulmonary function diagnostics for COPD and asthma patients

This European funded research project aims for the development of a portable pocket sized electronic multiple-sensor micro-system for low cost, high volume and high cost, low volume equipment for improved diagnosis of pulmonary diseases and pulmonary diagnostic functions in general. The microsystem will measure Peak Expiratory flow (PEF), Temperature (T), Pressure (P) and Relative Humidity (RH) and will comply with (1) the Body Temperature Pressure Saturation standard (BTPS), (2) The American Thoracic Society, ATS and (3) the Recommendations of the European Respiratory Society, ERS. A single chip multiple-sensor has been realized applying Silicon and MEMS technology. P-type doped resistive elements are used for the sensing elements, which guarantees best reproducibility and accuracy. Much attention has been devoted to the right mounting technique where response time is a main issue here in particular for the PEF measurements. So far, except for the RH measurement all elements are integrated on one single chip.