A Semi-coaxial MEMS-based LiDAR

Light Detection and Ranging (LiDAR) with the high accuracy and large measurement range has been applied in many fields. The emergence of MEMS-based LiDAR systems provides a high promising solution to a low-cost, small volume commercial LiDAR system. In this paper, we have discussed two current solutions to MEMS-based LiDAR systems and a new concept of a semi-coaxial LiDAR system based on two uniaxial MEMS mirrors is presented. Compared to the lD or 2D MEMS scanning solution, the semi-coaxial solution with two independent MEMS mirror modules has unique advantages in the stability control of MEMS mirrors, hardware consumption, receiving energy and provides a optimization and supplement to the current MEMS-based LiDAR system.