Process and Design Challenge for SMR-type Bulk Acoustic Wave (BAW) Filters at Frequencies Above 5 GHz

With the new 5G wireless communication standard on the horizon, new and formerly unused bands will be introduced with frequencies up to 6 GHz. BAW filters play a crucial role supporting those bands due to their tight guard-band and steep rejection requirements. This paper will elaborate on process and design challenges based on a 5.2GHz filter design.