Cycloidal scanning with MEMS micro mirror for an omnidirectional long range LiDAR

An omnidirectional MEMS mirror for long range LiDAR is proposed on the basis of cycloidal scan assuming application for the self-driving vehicles. The proposed cycloidal scan is effective for adjusting scanning speed depending on distance. A “Pantograph type” omnidirectional mirror is designed and fabricated using single crystalline silicon. The mirror has two electrostatically driven actuators. Voltages are applied for respective axes at two different phases and an optical angle of about 2.5 degrees is obtained for circular scans at a resonant frequency of 2281 Hz in the initial experiment.