Optimization of the drive circuit for the sensitivity-enhanced film bulk acoustic resonator

An optimal drive circuit for the sensitivity-enhanced film bulk acoustic resonator (SE-FBAR) has been presented in this paper. The SE-FBAR is made of a thin ZnO piezoelectric film sandwiched by two electrodes. The drive circuit started with a kind of Parallel Feedback Pierce circuit (common-base Clapp driving circuit) in which the Modified Butterworth-Van Dyke (MBVD) equivalent circuit of FABR is used. By theoretically calculating, it is proved that there is a minimal capacitance that makes the load quality factor of FABR Q
_L
has the maximal value. After simulation in Advanced Design System (ADS), it is shown that the drive circuit worked at the resonant frequency 1.488GHz.