Simultanious Angular and Linear Motion Detection Circuitry for a MEMS 6-DOF Piezoelectric IMU

In this paper, we present the development of the electronic processing circuitry for the simultaneous detection of linear and angular motion. The circuit is designed for a 6-DOF, single mass, piezoelectric MEMS inertial measurement unit. The main purpose of this study is to ensure the separation of the x-axis acceleration and z-axis angular velocity signals. These two signals, measured from the same electrode, are processed through a proposed electronic circuitry. The used input data is based on a previous numerical result obtained from the structure. Results show that measured signal outputs from acceleration and angular velocity components are the same when measured simultaneously or separately. The proposed electronic circuitry is therefore validated.