A Suspended Thick-Winding Inductor for Integrated Voltage Regulator Applications

In this letter, a suspended thick-winding inductor is demonstrated for integrated voltage regulator applications. A suspended thick-winding inductor with an area of 2.9 mm
²
and an inductance of 25 nH is designed and fabricated. The inductor has a winding thickness of 65 μm and a DC resistance of 121 mQ. A quality factor > 30 is maintained at 100-200 MHz. A peak inductor efficiency of 97.8% is analytically calculated for voltage conversion from 1.8 V to 1.1 V at 100 MHz.