Evaluation of materials used in cleanrooms with ESD sensitive hardware

Measurements were done on nearly 90 products to determine their cleanliness and ESD protective properties. Categories of materials tested include floor tiles and mats, gloves, finger cots, bags and sheeting materials, garments, swabs and wipes. A variety of test methods was used to evaluate the materials. The results showed that few products had both nonvolatile residue less than 1 mg/ft/sup 2/ and static dissipative properties.