A Low-Latency 16-Phase Pulse Width Modulator with Phase Angle Control for 140MHz Fully Integrated Voltage Regulators on 22nm Tri-Gate CMOS

A 16-phase Pulse Width Modulator (PWM) for Fully Integrated Voltage Regulators (FIVR) manufactured on a 22nm tri-gate CMOS process is presented. The PWM supports a wide operating frequency range of 20MHz-320MHz, individually programmable phase angles from 0° to 360° with 11.25° resolution, a low latency of 150ps, and synchronized enabling/disabling of phases. The PWM can be phase-locked to a spread-spectrum reference clock for EMI/RFI control. The design does not require low-leakage analog components.