An Error Compensation Algorithm for Indirect Resonant Planar Relative Permittivity Sensor Principles up to 100 GHz

This paper presents an error compensation algorithm for indirect resonant planar relative permittivity sensor principles up to 100 GHz. Besides the measurement of the material under test (MUT), the algorithm requires additional measurements of at least two reference materials. The proposed algorithm is tested for the three most relevant modeling errors occurring while measuring with an indirect planar measurement principle. These include erroneous assumptions regarding the geometrical dimensions, the effective roughness and the air gap between the sensor and the MUT. The proposed algorithm results in an average improvement of the error of the extracted relative permittivity values of 90.46 %.