Defect Mode for Periodic Structures With Broadband CPW-to-MS Transitions Fabricated With COC Polymer Substrate and on-Wafer Measurements up to 500GHz

We present a broadband CPW-to-microstrip transition. The substrate is a 10μm-thin film of low loss COC polymer deposited by spin-coating on a locally metalized Silicon-wafer for the ground plane. In the microstrip section, we have fabricated a sinusoidally periodic pattern filter as a reference. In a second structure, we have included a defect in the middle of the filter. We have characterized both structures with on-wafer measurements up to 500GHz. The defect mode is clearly observed in the bandap with a nice peak at 290GHz.