Deterministic Integration of Quantum Dots into On-Chip Multi-Mode Interference Couplers Via in-Situ Electron Beam Lithography

On-chip quantum optical circuits offer superior performance and scalability compared to bulky optical setups. Additionally, the up-scaling of quantum systems will foster the realization of photonic quantum computers to outperform their classical counterparts. In this context, the deterministic integration of quantum emitters into on-chip photonic elements is crucial for the implementation of scalable on-chip quantum circuits. Recent activities in this field include hybrid QD-waveguides for enhanced photon in-coupling [1] and first, rather tedious steps towards the controlled integration of QDs using multistep-lithography [2] as well as AFM tip transfer [3].