Ultra-thin Parylene-C Deposition on PDMS

This study reports the ultra-thin Parylene-C deposition on PDMS substrate for a controllable and reliable process of Parylene-C caulked PDMS (pcPDMS). This work covers the depositions on PDMS substrates with different prepolymer ratios (mass of base to curing agent, @ 10:1, 30: 1 and 50: 1). Stiffness could be modulated in a wide range via the proposed pcPDMS process. The prepared pcPDMS would find applications in biomedical studies, such as mechanobiology.