A MEMS accelerometer based on synchronizing DETF oscillators

In this abstract, a novel MEMS resonant accelerometer based on synchronized double-ended tuning fork (DETF) oscillators is reported. Synchronization is recently proved to enhance the stability of coupled MEMS oscillators. In this report, synchronization was utilized to improve the performance of the resonant accelerometer. In the experimental evaluation, scale factor of the sensor proposed was 1056Hz/g. Through synchronization, the zero-bias instability of the oscillator was improved to 98ppb in an integration time of 1s, which is 2 times better than before. This design demonstrates the feasibility of resonant sensors based on synchronizing DETF oscillators and provides a new method in improving their performance.