Sensitivity Improvement of MEMS Thermal Wind Senor Using Vertical Stacking Thermistors

In this paper, a novel MEMS thermal wind sensor adopting vertical stacking thermistors is proposed for the first time. Compared with the traditional wind sensors, the novelty of this work is that eight thermistors, fabricated on two layers, can achieve improved sensitivity of wind detection. The sensor is tested in wind tunnel in calorimetric principle and the heater is supplied with constant voltage (initial power 210 mW). Experiments demonstrate that the sensitivity of the proposed senor is double that of the traditional one without increasing the chip size. Measuring range of wind speed from 0 m/s to 33 m/s and full range (360°) of wind direction detection have been achieved.