A Closed-Loop Controlled Cmos Mems Biaxial Scanning Mirror for Projection Display

This work presents a bi-axial electromagnetically-driven piezoresistively sensed scanning mirror with a θopt.D·fr, fast product over 2400 deg·mm·kHz, showing the capability to achieve HD720 ( 720×1280) display resolution. Both driving and sensing capabilities are conveniently realized by CMOS MEMS technologies. The transduction mechanism provides a more linear response than capacitively transduced scanning mirrors. Based on the open-loop characterization of the driving and sensing performance, closed-loop control of slow-axis motion is designed and demonstrated.