Numerical simulations of nanosecond laser annealing of Si nanoparticles for plasmonic structures

This paper reports numerical simulations of nanosecond laser thermal annealing of plasmonic structures based on Si-nanoparticles embedded in a SiO
₂
matrix. From these simulations, we extracted guidelines for the structure design to be adopted. This study also investigates the expected laser annealing process window and the influence of nanoparticles coverage.