Adaptive Control for The Electrostatic Microactuators with Stochastic Disturbance

In this paper, we consider the problem of adaptive control for a class of electrostatic microactuator system with stochastic disturbance and unknown parameters. The displacement state of the system is required to be constrained in a bound compact set to prevent contact between the movable and fixed electrodes. To solve this problem, an adaptive control law based a barrier Lyapunov functions is constructed, which ensures that the displacement of the electrostatic microactuator does not violate its bounded constraint, and the velocity variable remains bounded in probability. Moreover, the tracking error of the system can be regulated to an small region of zero in mean. Finally, simulation is given to verify the effectiveness of the control scheme.