Investigation of the electrodynamic characteristics of 2.45 GHz microwave plasma sheet source

This work presents original concepts of describing the electrodynamic properties of a microwave plasma source by an equivalent circuit. The main goal of this work was to investigate the electrodynamic characteristics of a 2.45 GHz microwave plasma sheet source. The aim was achieved by performing experimental measurements which were then supplemented with calculations of the electrodynamic characteristics of the device using the equivalent circuit method. The experimental measurements allowed the energy efficiency of the presented plasma source to be assessed, while the calculations allowed the impedance of the generated plasma to be estimated. Additionally, the method of using an equivalent circuit provided the opportunity to determine the dimensions of a diaphragm whose introduction would improve the energy efficiency of the device.