Guaranteeing Preselected Tracking Control of Loaded Piezoelectric-actuated Micro-Positioning Platform

The micro/nano positioning system built by the piezoelectric actuator is discussed in this paper. To make the positioning mechanism applicable to the real application, the coupling effect due to the changing of input frequencies and loads need to be considered in the hysteresis modeling method, since such effect causes the output of the piezoelectric actuating system to show more complex hysteretic properties. A modified rate-dependent Prandtl-Ishlinskii (RDPI) model is developed in this paper to describe the output characteristics by involving the input frequencies and the load together in the dynamic threshold function. Based on the established model, a robust guaranteeing preselected tracking controller is designed to weaken the influence of nonlinear characteristic on the actuating precision effectively. The formulated controller can guarantee the stability of the closed-loop system and ensure the positioning precision by selecting the proper tracking function. The correctness and precision of the proposed controller have been validated by the simulation results.