All-Optical Performance Characterization of Silicon Mach–Zehnder Modulator for Wafer-Level Test

We have developed a new test method for optical modulator performance characterization that does not require electrical signal input. The modulator is modulated by the photovoltage generated from a photodiode fabricated near the modulator. This method has the potential to remove high-frequency signal lines in a testing system and enables simplification of wafer-level tests in the mass production of photonics devices.