Design of a permanent magnet planar synchronous micromotor

The downscaling of motors is an important issue in the field of microsystems. First prototypes of planar electromagnetic micromotors have demonstrated their potential. New hybrid motors of diameter /spl phi/3 to /spl phi/8 and mm are currently under construction. They are designed around state-of-the-art deep lithography means of fabrication. They show very promising computed performances, as well as compatibility with standard electronic supplies. They should enhance the development of micromotors.