Mems-Processed Artificial Muscles with Freely-Programmable Actuation Direction

We present for the first time a fabrication process which allows the patterning; internal alignment; and integration of liquid crystal elastomers (LCEs), a promising family of "artificial muscle" actuators for MEMS technology. The actuation direction of LCEs is defined by the internal alignment of the liquid crystal domains. The approach described here allows the definition of arbitrary alignment directions using a wafer-level process. This technology thus allows programming and structuring of artificial muscle actuators with arbitrary actuation direction and direct integration with standard silicon, polymer and other micromechanical components.