An Integrated Miniature Conductivity and Temperature Sensor Chip with Open-Cell Annular Electrode

In this work, an integrated miniature conductivity and temperature sensor chip with open-cell annular electrodes is presented, which can improve the system's ability of anti-jamming by eliminating the proximity effects with four annular electrodes. The open-cell design is proved to have higher performance in micron and nanometer scale without channel blockage. The whole system shows that the accuracy of conductivity measurement can achieve 0.04 mS/cm with 0.001 mS/cm resolution; the accuracy of temperature sensor is better than 0.01 °C in the range of 0 °C to 50 °C with 0.0004 °C resolution. The miniature sensor and compact system have many potential applications with tiny volumes, such as blood test and microfluidics.