A Novel Mems 3-Axis Thermal Accelerometer with 5-Wire Structure Using Planar Stacking Method

This paper proposed a novel MEMS 3-axis thermal accelerometer for the first time. Two five-wire structures perpendicular to each other are fabricated using planar stacking method. Compared with other 3-axis thermal accelerometers, this accelerometer has simpler fabrication process and signal processing circuit, and the sensitive directions are orthogonal with almost the same sensitivities. For one of the five-wire structures, the sensitivities of the two orthogonal directions are 16.1mV/g and 18.4mV/g respectively. This accelerometer shows good linearity for a range about 0-6g acceleration at 20Hz.