A CMOS-Based Thermo-Electrocatalytic Gas Sensor for Selective and Low-Level Detection of Carbon Monoxide and Hydrogen

This work reports on the use of a CMOS based thermo-electrocatalytic (TE) gas sensors for selective detection of hydrogen and carbon monoxide. Palladium and platinum oxidation catalysts were employed and deposited onto the substrates by means of ink-jet printing. The manuscript explores the impact that the catalyst and the microheater operational temperature have on the sensing performance particularly in relation to gas sensitivity and selectivity. Benchmarking tests between the TE sensors and commercial metal oxide chemiresistors were also carried out.