Full-System Simulation of Airborne Capacitive Mems Transducers Operating in the Audible and Ultrasonic Regime

A compact model of an airborne capacitive acoustic MEMS transducer is generalized to perform predictive full-system simulations in the audible and ultrasonic regime. The model helps to assess and understand the interaction of the device with the surrounding air for frequencies up to 100 kHz while considering acoustic high-frequency effects and sound wave propagation. We successfully simulate transducers with varying design parameters operating under different working scenarios. The predictive power of the model and its potential for full-system design and optimization are highlighted by the very good agreement between simulations and experimental results.