A Hybrid Pneumatic and Piezoelectric 3d Micro Scanner for Cancer Imaging

This paper presents the development of a new MEMS confocal scanner based on pneumatic and piezoelectric actuators. Confocal imaging was carried out by actuating an objective lens in out-of-plane direction (Z-axis) and lateral directions (X- and Y-axes) using a pneumatic actuator and two piezoelectric actuators, respectively. The novelty is in using hybrid pneumatic and piezoelectric actuators for confocal scanning applications. We demonstrated 3D scanning with a 785 nm laser, and the new confocal system could assist clinicians to accurately identify lesions in the future.