Next Generation of Highly Miniaturized Bulk-Mems Fabry-Pérot Filters For Infrared Microspectrometers

This paper reports on the progress in miniaturization of bulk micromachined FP filters and tunable detector modules for the mid infrared. The chip size was reduced from 7×7 mm
²
to 5×5 mm
²
, enabling integration into TO5-size detector packages, which is about only one quarter of the formerly used TO8. At the same time a high optical throughput is maintained. A MEMS design with two movable reflectors is used, which allows for lower actuation voltages and provides negligible acceleration sensitivity.