Magnetically Driven Actuators for Vector Scanning Mems Mirrors

This paper reports a new type of magnetic actuator, for which a unique technique to integrate NdFeB into Si is utilized. In order to develop the driving concept different device designs and coils have been employed for evaluating the force generation. High force of up to 0.01 N was measured by activating one single micro-magnet. Moreover, great design flexibility is given, since the force delivery of actuators can be adapted by changing quantity and volume of the micro-magnets, to fulfill the requirement of vector scanning MEMS mirrors.