Magnetostrictive Performance of Electrodeposited TBXDY(1-X)FEY Thin Filmevaluated from Microactuator

This paper presents the process technology of microstructures fabrication of a magnetostrictive thin film Tb
_x
Dy
_(1-x)
Fe
_y
for magnetic actuation, and the magnetostrictive actuation performances are evaluated. The film is deposited by electrodeposition using a three-electrodes system. Bi-material cantilever structures are fabricated and the magnetic actuation performances are evaluated. The actuators show high magnetostriction coefficients of approximately 1200 ppm at magnetic field 9000 Oe.