Method for Strong Parylene-C Bonding to Surfaces Containing Gold and Silicon Dioxide

This paper presents the characterization of a method to solve the adhesion problem between parylene-C and surfaces containing gold and silicon dioxide. The adhesion is achieved by chemical linkage. Novel aspects include a new primer process to allow parylene coatings on surfaces consisting of both gold and silicon dioxide; and proving the adhesion quality by standard autoclave tests at 121°C for 15 minutes. Our approach is easily adaptable in the parylene-C deposition process and suitable for biomedical devices.