Aerosol Deposition Method - A Promising Novel Method to Produce Ceramic Gas Sensor Films at Room Temperature

The Aerosol Deposition Method (ADM), which bases on the mechanism of Room Temperature Impact Consolidation (RTIC), allows for producing dense ceramic films completely without any high-temperature process directly from an initial ceramic powder on almost any substrate material. This contribution gives examples for some applications of the ADM in the field of gas sensing. The deposition at room temperature may also allow for using substrates that cannot be used presently due to the high firing temperatures.