Hydrocarbon Gettering Effect for Contaminants from Factory Environment

Carbon and hydrocarbon gettering effects for alkali dopant from factory environment and other heavy metal are investigated. The gettering layers are produced by C
3
H
5
, C
7
H
7
and C monomer implantation. Potassium is concentrated to the gettering layer region after annealing. The gettering effect for potassium is increasing with increase the hydrocarbon cluster size. However, carbon gettering effects for magnesium and sodium are not dominant. In addition, Molybdenum and tungsten diffuse only a little, so the carbon gettering effects are small. The gettering effect by hydrocarbon cluster dopant for potassium is effective.