Energy-Storing Hybrid 3D Vertical Memory Structure

A novel 3D vertical structure that can store both information and energy is proposed in this letter. For the fabrication of 3D structural devices, an isolation layer (IL) is essential because it prevents interference between each cell of the device. Given that it occupies a large volume in the 3D structure, the IL can be more effectively utilized. In particular, for energy efficiency, an energy-storage device can be adopted into the IL; thus, both energy and information can be stored in the same volume using the proposed hybrid 3D vertical structure. The demonstration of the proposed structure showed a strong potential for various fields of 3D stackable devices that require high-density integration and energy efficiency.