EUVL Optics: Status and Future Perspectives

Summary form only given, as follows. The complete presentation was not made available for publication as part of the conference proceedings. For more than 50 years Moore's Law has been driving the steady progress in semiconductor technology. This was enabled by strong resolution improvements of lithography optics. Currently the next big technology step is happening: The introduction of EUV Lithography into chip making. High performance EUVL optics is now produced in volume. Concurrently the next generation, EUV High NA, is in development.