Exergy Analysis of the Recirculation Scheme for Air Preparation of Clean Rooms Based on a System Approach

The possibility of using an exergy method of thermodynamic analysis as a mean of monitoring the parameters of the technological microclimate and the energy efficiency of an air preparation system for clean rooms of microelectronics has been investigated on the basis of a system approach. A mathematical model of an air treatment system with a recirculation loop has been used. The estimation of the exergic efficiency of the selected air preparation scheme and the loss of exergy in its main elements, depending on various factors affecting its performance has been carried out. Grassmann diagrams of exergy losses for the system under study in the warm and cold periods of the year have been obtained. The use of exergy analysis allows defining the main methods and means of reducing energy losses and choosing the optimal variant of the scheme for the air preparation system of clean rooms.