Polysilicon 3D-mirror frequency shifter for WDM fibre-optic communication applications

This paper reports the design, fabrication, and testing of a monolithic integrated frequency shifter device using movable 3D-mirror to enable channel selection for WDM optics communication applications. The modification of Fabry-Perot microcavity length is implemented by micromechanical electrostatic actuators to enable a wide channel selection. The wavelength shifter is able to tune wavelength around 1.525-1.575 /spl mu/m to achieve the requirements of optical telecommunication band, and the flat transmission characteristic with low insertion losses over maximal wavelength range and minimal interchannel crosstalk between the coexisting transmission channels. Compared with the membrane mirror type of frequency shifter, the movable 3D-mirror frequency shifter overcomes the influence of residual stress within the membrane layers.