Multiple wavelength micromachined GaAlAs/GaAs vertical cavity filter array

We propose a novel approach to wavelength stabilization and wavelength trimming in a multi-wavelength add/drop filter and VCSEL using a micromachined DBR mirror tuned by differential thermal expansion coefficients. We demonstrate a 2/spl times/2 multiple wavelength micromachined GaAlAs/GaAs filter array loaded with a GaAs wavelength control layer.