Precision Measurement Method of Laser Beams Based on Coordinate Measuring Machine

A high-precision stability measurement scheme was designed and prototyped with the purpose of ensuring precise laser beam alignment during the assembly of an integrated interferometer. With retroreflectors added, the angular resolution of the system is improved while ensuring system stability. Hydroxide-catalysis bonding technology is used to create a stress-free bond between the various optical components of the system. After calibration using the coordinate measuring machine, the device achieved a measurement accuracy of ±6 μm for the absolute position of the laser beam in the global coordinate system. In angular measurements, an accuracy of ±21 μrad was attained. Over a 2-month period, the maximum positional drifts and the maximum angular drifts of the calibration parameters were ±3 μm and ±27 μrad, respectively.