Dynamic cloud-based computation for skipping lots in metrology : IE : Industrial Engineering

Semiconductor manufacturing is complex and driven by a very strict market in terms of quality, which is ensured by performing many control operations on lots. To reduce the cost of quality, we present a simple algorithm that dynamically cancels lot measurements, i.e. skips lots, that do not bring enough information. The industrial impacts of the algorithm and its implementation in a cloud-based architecture are discussed.