Sliding Mode Control for an Optimal MEMS Micromirror Actuator with Parameter Uncertainty

In this paper, the modeling and control of an optimal mirror plate actuator proper for an optical switch in Micro Electro Mechanical System (MEMS) with application in the large channel count is investigated. By employing the squeeze film damping effects, the transient response of this optimal plate actuator shows a better performance. We use the optimal structure with a tilted bottom plate which can reach to the maximum tilt angle by applying a minimum actuating voltage. Sliding mode control (SMC) is utilized to control of the tilted actuator because of its suitable performance in the presence of uncertainties and disturbances. Finally, simulation results demonstrate the robustness of the proposed sliding mode control strategy.