Realization of Vibration Absorption at Multiple Frequencies on Vacuum Chamber with Cryopump

A vibration isolation device with an active dynamic vibration absorber is developed to remove vibration induced by a cryopump. Cryopump is used to make high-vacuum and low-temperature environments for precise measurement. However, it induces vibrations with multiple frequencies, which may deteriorate measurement accuracy. This study focuses on removing low-frequency vibration because conventional vibration isolation devices for cryopump can hardly remove such vibration. In the developed vibration isolation device, an active vibration absorber is used to remove the vibration efficiently at low frequencies. In this report, the design concept and structure of the fabricated apparatus are described.