Research on the electrification of surface protective materials used in power electronic devices

The design of surface termination structure and the control of surface electrical field are the sticking points in the improvement of the withstand voltage and performance of power electronic devices. After the optimized terminal design of silicon devices, there is still a need for appropriate passivation layers and protection materials to protect the surface from contamination. In this paper, the electrification rule and mechanism of surface protection materials used in silicon devices are investigated using the charge separation method and the laser probe detection method. The influence on the withstand voltage of devices and stability at high temperature is also discussed.